AF2 自动对焦(Autofocus)
借由探测器的回馈讯号调整物镜位置,得到待测物焦点,而获得待测物的确实高度(如下左图)。
CF4 共轭焦(Confocal, Laser)
激光光束经由物镜迅速上下移动聚焦于待测物上,此时偵测器能经由孔洞得到Z大光的强度,如此侦测器根据此讯号确定其位置(如下右图)。
AF2 CF4
n 应用
ü 集成电路封装和表面贴片技术
ü 厚膜混合电路:膜厚度的自动化测量
ü 精密部件
[1] BGA [2] thick film [3] dispenser dots [4] laminaten 技术参数
Scan modules
Measuring range in x,y-direction [mm]
Resolution in x,y-direction [mm]
Positioning range in z-direction [mm]
Max. measuring speed [mm/s]
SC 50
50X50
0.5
100
50
SC 100
100x100
SC 150
150x150
SC 200
200x200
other dimensions on request
Sensors
Resolution z [μm]
Resolution x,y [μm]
Working distance [mm]
Measuring range in z-direction [mm]
Camera (optional)
Confocal point sensor
CF 4
0.02
1
4
1.0
off-axis
CF 13
13
(BMT5)
Autofocus sensor
AF 2
0.025/0.0111)
2
1.5/0.651)
integrated
AF 5
5
(BMT3)
Chromatic white light sensor
CRT 52)
0.010
0.3
off-axis (BMT5)
CRT 122)
0.025
12
CRT 162)
0.075
8
16
3.0
Holographic sensor
CP 15
1.8
(BMT 4)
CP 42
6.0
15
42
8.0
CP 65
10.0
25
65
18.0
1) with restricted measuring range 2) with 1, 4 or 30 kHz measuring frequency available
Modules
System controller
High performance industrial PC, DVD-Writer, network card,
Windows XP Professional
Cabinet and work table MT 70
Stable container for electronic modules with work table
1550x800x750 (lxh in mm)
Granite measuring stand MP 100
Portal construction, 660x450x497 (lxh in mm) for SC 50 to SC 150
Granite measuring stand MP 200
Portal construction, 680x480x385 (lxh in mm) from SC 200
NF μsoft standard software
NanoFocus control and evaluation software, profile and topography
representation, roughness calculation compliant with DIN EN ISO
Options
NF 3D-Plus
Photo-realistic 3D presentation of topographical data (OpenGL)
NF Active X
Interface modules to program individual measurement processes and
calculations (Excel/VBA)
NF Hybridmaster
Automation tool for the use of μscan® in thick film production incl. SPC and
teach in module
NF Flatmaster
Automated measurement of straightness, flatness and warpage
NF Solder
Automated off-line measurement of fine pitch solderpaste print in SMT production
NF AutoScan
Automated measurement of profiles and surfaces at arbitrary measurement
points
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