FT-351高温四探针电阻率测试系统
FT-351
high temperature four probe resistivity test system
一.概述:overview
采用四探针双电组合测量方法测试方阻和电阻率系统与高温箱结合配置专用的高温四探针测试探针治具与PC软件对数据的处理和测量控制,满足半导体材料的电导率对温度变化测量要求,先进的测控软件实时绘制出温度与电阻,电阻率,电导率数据的变化曲线图谱,及过程数据值的报表分析.
Adopt four probe double electric
combination test method to test square resistance and resistivity system .
Combined with high temperature box for special high temperature four-point
probe test probe jig with PC software for data processing and measurement
control. Meet the test requirements of
the conductivity of the semiconductor material to temperature change.
Advanced measurement and control software to Real-time render the change curve
of temperature and resistance, the resistivity, the electrical
conductivity data,and process data values statement analysis.
FT-351高温四探针电阻率测试系统二.适用行业:Applicable industry:
广泛用于:企业、高等院校、科研部门对导电陶瓷、硅、锗单晶(棒料、晶片)电阻率、测定硅外延层、扩散层和离子注入层的方块电阻以及测量导电玻璃(ITO)和其它导电薄膜等新材料方块电阻、电阻率和电导率数据.
Is widely used in: Corporate. colleges and
universities and scientific research departments of conductive ceramics.
silicon. germanium single crystal (bar. wafer) resistivity. The determination
of silicon epitaxial layer and diffusion layer and ion implantation of square
resistance as well as the measurement of conductive glass (ITO) and other new
materials such as conductive films square resistance and resistivity and conductivity
data.
双电测四探针仪是运用直线四探针双位测量。设计符合单晶硅物理测试方法标准并参考美国 A.S.T.M 标准。
The double electric four-point probe is
used to measure the four probes in a straight line.The design conforms to the
national standard of the single-crystal silicon physical test method and the
American A.S.T.M standard.
FT-351高温四探针电阻率测试系统三.型号及技术参数Models and technical parameters:
规格型号Models
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FT-351A
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FT-351B
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FT-351C
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1.方块电阻范围sheet resistance
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10-5~2×105Ω/□
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10-6~2×105Ω/□
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10-4~1×107Ω/□
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2.电阻率范围resistivity range
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10-6~2×106Ω-cm
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10-7~2×106Ω-cm
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10-5~2×108Ω-cm
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3.测试电流范围test current range
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0.1μA.μA.0μA,100µA,1mA,10mA,100 mA
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1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA
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10mA ---200pA
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4.电流精度current accuracy
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±0.1%读数
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±0.1读数
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±2%
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5.电阻精度resistance accuracy
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≤0.3%
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≤0.3%
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≤10%
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PC软件界面
PC software interface
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显示:电阻、电阻率、方阻、温度、单位换算、温度系数、电流、电压、探针形状、探针间距、厚度 、电导率
LCD: resistance.resistivity. sheet resistance. temperature.unit conversion. temperature coefficient. current. voltage. probe shape. probe spacing. thickness
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7.测试方式test mode
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双电测量Double electrical measurement
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8.四探针仪工作电源working power
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AC 220V±10%.50Hz <30W
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9.整机不确定性误差/ machine uncertain errors
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≤3%(标准样片结果 standard samples)
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≤15%
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Z高温度(选购)Highest temperature
(choose and buy)
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常温 Normal temperature -400℃;600℃;800℃;1000℃;1200℃;1400℃;1600℃
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气氛保护(气体客户自备)
Atmosphere protection(Gas was provided by customers themselves)
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常用气体如下:氦(He)、氖(Ne)、氩(Ar)、氪(Kr)、氙(Xe)、氡(Rn),均为无色、无臭、气态的
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