MCL 纳米线性位移台LR200 _详细资料

产品信息 Features Long range single axis motion: 200 μm Less than 5 nm out of plane motion Low profile design Closed loop control Typical Applications Surface metrology Wafer scanning and alignment Optical alignment Product Description The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ? technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS. Technical Specifications Range of motion (X) 200 μm Resolution 0.4 nm Resonant Frequency 500 Hz ±20% Resonant Frequency (100g load) 200 Hz ±20% Stiffness 0.2 N/μm θ roll, θ pitch (typical) ≤0.3 μrad θ yaw (typical) ≤0.3 μrad Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Al Controller Nano-Drive? * Larger load requirements should be discussed with our engineering staff. Additional Information Nano-LR200 Drawing Nano-LR200 Catalog Pages Related Products Nano-OP Series Nano-YT500 Accessories Nano-Drive?

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Technical Specifications
Range of motion (X)	200 μm
Resolution	0.4 nm
Resonant Frequency	500 Hz ±20%
Resonant Frequency (100g load)	200 Hz ±20%
Stiffness	0.2 N/μm
θ roll, θ pitch (typical)	≤0.3 μrad
θ yaw (typical)	≤0.3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al
Controller	Nano-Drive?
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-LR200 Drawing	Nano-LR200 Catalog Pages