TMC STACIS III主动隔振系统_详细资料

产品信息 STACISIII是进的主动振动隔离系统。采用先进的惯性振动传感器，复杂的控制算法，和进的压电致动器。STACIS通过连续测量地板活动、扩大和收缩压电致动器过滤地板振动来进行实时隔离振动。Z初 STACISIII是进的主动振动隔离系统。采用先进的惯性振动传感器，复杂的控制算法，和进的压电致动器。STACIS通过连续测量地板活动、扩大和收缩压电致动器过滤地板振动来进行实时隔离振动。 Z初被设计用于先进半导体工厂的精密显微光刻、计量和检测设备的隔振，STACIS现在是嘈杂环境中敏感仪器的行业标准解决方案，包括但不局限于半导体晶圆厂、失效分析实验室、纳米技术研究、纳米加工设备和材料研究。 STACIS III包括一个新型改进的数字控制器----DC - 2020。它的前后面板上有新型双核处理器，以太网和USB串口，这个新型先进控制系统为用户提供了一个现代的、易于使用的图形用户界面(GUI)。 拥有在世界各地的数百个成功安装案例，STACIS对于大部分振动敏感仪器来说都是Z理想的振动消除系统。 Specifications- Performance Specifications Active degrees of freedom 6 Active bandwidth 0.6 Hz - 150 Hz Passive natural frequency 18 Hz vertical and horizontal Effective active resonant frequency 0.5 Hz Isolation at 1 Hz 40% - 70% Isolation at ≥2 Hz ≥90% Settling time after a 10 lb (4.5 kg) step input (10:1 reduction) 0.3 sec Internal noise <0.1 nm RMS Operating load range per isolator Low capacity: 400-1100 lbs (181-499 kg) Med capacity: 900-2100 lbs (408-953 kg) Hi capacity: 1900-4500 lbs (862-2041 kg) Static lift capacity per isolator 9000 lbs (4090 kg) Stiffness (1000 lb / 454 kg mass, Med capacity isolator) 40,000 lb/in. (73 x 105 N/m) Magnetic field emitted at maximum 4 in.(102 mm) from the isolator <0.02 μG broadband RMS Isolator Design, Dimensions, and Environmental and Utility Requirements Environmental and safety CE and RoHS compliant Active isolation elements high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC Passive isolation element single stiff isotropic elastomer (no compressed air supply required) Vibration sensor elements downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion Active feedback control loop Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface Isolator dimensions (WxDxH) 11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm Isolator weight 75 lb (34 kg) Operating temperature 50° - 90° F 10° - 32° C Storage temperature -40° - 130° F -40° - 55° C Humidity (operating) 30 - 60% System power requirements 100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant Floor displacement <480 μin. (12 μm) below 10 Hz Isolator count per system minimum of 3 Options laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods DC-2020 Controller Specifications Dimensions (WxDxH) 19 x 8.5 x 1.75 in. 483 x 216 x 45 mm Weight 6.3 lb (2.9 kg) Processor 150/75 MHz dual core Sampling rate 10 kHz Analog outputs 16 channels Analog inputs 16 channels Status light single LED Front panel ports 1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC Rear panel ports 1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators User interface Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI Performance- 4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS) 更多详细信息请联系我们！

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Active degrees of freedom	6
Active bandwidth	0.6 Hz - 150 Hz
Passive natural frequency	18 Hz vertical and horizontal
Effective active resonant frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at ≥2 Hz	≥90%
Settling time after a 10 lb (4.5 kg) step input (10:1 reduction)	0.3 sec
Internal noise	<0.1 nm RMS
Operating load range per isolator	Low capacity: 400-1100 lbs (181-499 kg) Med capacity: 900-2100 lbs (408-953 kg) Hi capacity: 1900-4500 lbs (862-2041 kg)
Static lift capacity per isolator	9000 lbs (4090 kg)
Stiffness (1000 lb / 454 kg mass, Med capacity isolator)	40,000 lb/in. (73 x 105 N/m)
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator	<0.02 μG broadband RMS

Environmental and safety	CE and RoHS compliant
Active isolation elements	high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation element	single stiff isotropic elastomer (no compressed air supply required)
Vibration sensor elements	downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop	Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Isolator dimensions (WxDxH)	11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm
Isolator weight	75 lb (34 kg)
Operating temperature	50° - 90° F 10° - 32° C
Storage temperature	-40° - 130° F -40° - 55° C
Humidity (operating)	30 - 60%
System power requirements	100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant
Floor displacement	<480 μin. (12 μm) below 10 Hz
Isolator count per system	minimum of 3
Options	laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods

Dimensions (WxDxH)	19 x 8.5 x 1.75 in. 483 x 216 x 45 mm
Weight	6.3 lb (2.9 kg)
Processor	150/75 MHz dual core
Sampling rate	10 kHz
Analog outputs	16 channels
Analog inputs	16 channels
Status light	single LED
Front panel ports	1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC
Rear panel ports	1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
User interface	Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI

TMC STACIS III主动隔振系统

产品信息

Specifications-

Performance Specifications

Isolator Design, Dimensions, and Environmental and Utility Requirements

DC-2020 Controller Specifications

Performance-

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