TMC主动隔振基座_详细资料

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TMC主动隔振基座 SEM-Base® VI
用于SEM的TMC主动式压电陶瓷振动消除地面式光学平台。
SEM- Base® VI设计用于承载所有的：
商业扫描电子显微镜（SEMs）
多数聚焦离子来显微镜（FIB）及小型双尤来设备。
SEM-Base® VI可以提供升级版的振动隔离性能及更快更强劲的控制器，带有图形用户界面（GUI）。SEM-Base VI让越来越多的实验室、工厂可以实现能够满足其关键设备所要求的地面振动水平。
SEM-Base® VI采用独特串联结构，振动传感器测量的是地面振动，不是负载振动。这样就确保了负载谐振将不会限制平台的振动隔离或者引起不稳定性。振动传感器采用低频惯性速度传感器，在测量亚Hz振动时具有大的敏感度。加上TMC独特的压电致动技术，SEM-Base® VI即使在振动情况已经很好的地面上也可以实现超高水平的振动消除。
相比之前的SEM-Base版本，SEM-Base® VI的振动隔离能力平均来说增加了6dB，而且采用了TMC新一代控制器DC-2020，采用新式双核处理器，为设备拥有者及研究者提供非常简单易于使用的图形用户界面，可以快速进入系统并实现平和的操作心态。当通过Ethernet连接时，DC-2020在用户的浏览器上即可实现SEM-Base图形用户界面，无需额外安装软件或者应用程序。当然用户也可以通过控制器的菜单驱动液晶屏（LCD）直接进行控制。
TMC主动隔振基座SEM-Base® VI优势:
主动惯性振动消除
SEM-Base® VI采用高灵敏度的低频惯性速度传感器，即使在安静的地面上也可以达到高水平的振动衰减。
硬式装载技术
SEM-Base® VI兼容 SEM 内部预装的任何隔振系统，从0.6Hz开始主动QL消减地面低频振动。
串行设计与压电技术
独特串行设计加上高强度压电技术，SEM-Base® VI不但达到了宽至0.6Hz-150Hz的主动带宽，更实现了的惯性主动振动消除，2Hz以上的振动衰减可达 90%以上。
完全集成式的单平台设计
SEM-Base® VI设计与制造的集成化，将安装平台的工作简化到了jizhi，简单的定位与设置之后即可正常工作。
NOTE：可选SEM-Closure，专门设计用于保护SEM的完整环境解决方案。在SEM- Closure密封隔音室内可兼顾放置 SEM-Base® VI与Mag-Net X，保护SEM免除振动、磁场扰动与声波噪音的影响
SEM-Base® VI特点：
STACIS技术
主动惯性振动清除系统
895×1124×160 mm (35.25×44.25×6.3 in.)适合绝大多数商业SEM
负载能力：408-1134kg (900-2500 lb.)
隔振效率1Hz:40-70%
隔振效率经2Hi:90%
隔振效率＞3Hz:90-98%
6个主动自由度
安装容易，调试简单
兼容所有设备内直的振动隔离系统
电源：100-240VAC, 50/60Hz, <600W
是否需要空气：非气浮系统
CE与RoHS认证
完全集成式的单平台设计
可安装脚轮，轻松便携移动，无需搬运
兼容SEM-lift系统
SEM-Base® VI 性能规格：
Active degrees of freedom
6
Active bandwidth
0.6 Hz - 100 Hz
Passive natural frequency
12 Hz nominal
Effective active resonant frequency
0.5 Hz
Isolation at 1 Hz
40% - 70%
Isolation at 2 Hz
90%
Isolation at ≥3 Hz
90-98%
Internal noise
<0.1 nm RMS
Operating load range
Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)
High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg)
Static lift capacity
12,000 lbs (5454 kg)
Magnetic field emitted
at maximum 4 in.(102 mm)
from the platform
<0.02 μG broadband RMS
隔离器设计，尺寸，环境和实用要求
Environmental and safety
CE and RoHS compliant
Active isolation elements
high-force piezoelectric actuators that receive signal
from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation element
single stiff elastomer (no compressed air supply required)
Vibration sensor elements
downward facing geophone type inertial sensors
that measure floor vibration below the isolator
and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop
Floor vibration is measured, processed
and attenuated below the spring
supporting the isolated surface
Dimensions (D)
35.25 x 44.25 in.
895 x 1124 mm
Height
6.3 in. (160 mm) nominal,
doesn't change when SEM-Base is switched off
Operating temperature
50° - 90° F
10° - 32° C
Storage temperature
-40° - 130° F
-40° - 55° C
Humidity (operating)
30 - 60%
System power requirements
100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant
Floor displacement
<800 μin. (20 μm) below 10 Hz
内置控制器规格
Processor
150/75 MHz dual core
Sampling rate
10 kHz
Analog outputs
16 channels
Analog inputs
16 channels
Status light
single LED
Front panel ports
1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC
User interface
Front panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI

性能曲线：
1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

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Active degrees of freedom	6
Active bandwidth	0.6 Hz - 100 Hz
Passive natural frequency	12 Hz nominal
Effective active resonant frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at 2 Hz	90%
Isolation at ≥3 Hz	90-98%
Internal noise	<0.1 nm RMS
Operating load range	Standard capacity: 900 - 2,500 lbs (408 - 1134 kg) High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg)
Static lift capacity	12,000 lbs (5454 kg)
Magnetic field emitted at maximum 4 in.(102 mm) from the platform	<0.02 μG broadband RMS

Environmental and safety	CE and RoHS compliant
Active isolation elements	high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation element	single stiff elastomer (no compressed air supply required)
Vibration sensor elements	downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop	Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Dimensions (D)	35.25 x 44.25 in. 895 x 1124 mm
Height	6.3 in. (160 mm) nominal, doesn't change when SEM-Base is switched off
Operating temperature	50° - 90° F 10° - 32° C
Storage temperature	-40° - 130° F -40° - 55° C
Humidity (operating)	30 - 60%
System power requirements	100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant
Floor displacement	<800 μin. (20 μm) below 10 Hz

Processor	150/75 MHz dual core
Sampling rate	10 kHz
Analog outputs	16 channels
Analog inputs	16 channels
Status light	single LED
Front panel ports	1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC
User interface	Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI