1559A 质量流量计

1559A

流量比例控制器（大流量，常闭阀）

1559是一种通用型弹性密封的质量流量控制器，可在20slm（42.5cfh）到200slm（425cfh）量程范围进行气体的质量流量控制。相比于其它的大流量控制器，1559独有的控制阀门能够消除振荡、具有更好的响应时间。它的这个特点是通过使用一“平衡力”阀门的设计来实现的，它能够消除管道压力引起控制阀门内部的非平衡状态。1559的精度为全量程的±1％。                                                                                                         

例：型号1559A00421LS1BV                                                            采购序列号          

校准气体（SEMI气体编号）*

Helium, He                                                          001

Argon, Ar                                                            004

Hydrogen, H2                                                       007

Nitrogen, N2                                                         013

Oxygen, O2                                                         015

**校准流量SLM－sccm（相当氮气Z大200SLM）

20                                                                                                             021L                    

50                                                                                                             051L                    

100                                                                                                           12L               

200                                                                                                           22L                      

装配件（Y）

标配：Swagelok 0.5英寸管                                                                       S                         

选配：Swagelok^R 8VCR^R 凸接头                                                           R                         

选配：Swagelok^R 8VCO^R 凸接头                                                          G                         

阀

常闭                                                            1

电气/通讯连接器

模拟15针 D                                                     B

密封（Z）

标配: Viton^R                                                                                             V                         

选配: Neoprene^R                                                                                      N                         

选配: Buna N                                                                                            B                         

选配: Kalrez^R                                                                                            K                         

型号 1559A（续）

用于1559A的电缆线

CB259-5-10用来将1559连接至PR4000, 246, 247                                            

（如要在247上连接2个以上的通道，需要添加一个电源，请用CB1559-1-10）          

CB147-1-10用来将1559连接至146, 186, 647, 167                             

CB1559-1-M1用来连接1559A、247D和260PS                                 

*其他气体编号见附录B