EMS 150T镀膜仪(镀碳仪、喷金仪、离子溅射镀膜仪)_详细资料

产品信息

EMS150T S高分辨率离子溅射仪High Resolution Turbomolecular Pumped Sputter Coater

型号：EMS150T S 简介：分子涡轮高真空系统，CPU程序全自动控制，触膜屏用户界面，可镀多种膜材，也可镀相对较厚的膜。具有快速溅射易氧化和不氧化金属(贵金属)靶材的功能，可选各种溅射靶材，包括常用于场发射电镜的铱和铬。

可选配一系列可选附件，如：金属蒸镀、碳丝蒸镀、膜厚测量等。标准配置的样品台，无倾角，高度不可调。如果需要倾斜样平台，需要另外选择。

主要技术指标:
尺寸和重量：仪器机箱：585mm宽x 470mm长 x 410mm高 (总高: 650mm)

仪器总重量：33.4Kg

工作腔室：硼硅酸盐玻璃，152mm(内) x 127mm高

触摸屏全图像用户界面

样品台：标配件(无倾角，高度不可调) ，转速8-20rpm

真空系统：

涡轮分子泵：带有空气冷却的涡轮分子泵(标准配置里面) 旋转机械泵：双级旋转机械泵(需要另购)

真空度： 5x10^-3-----5x10^-1 mbar

溅射时间：长60分钟

溅射靶材：57mm Ø x 0.3mm Chromium(标准配置：铬靶材一个)

产品选购

货号产品名称规格

3380 EMS150T S - High resolution turbomolecular pumped sputter coater, including a 54mm Ø x 0.3mm chromium target 标准配置

91003 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter 个

其它附件的选购:

货号产品名称规格

3200 Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section 个

3210 Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. 个

3270 Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens 个

3280 Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited 个

3290 Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited 个

3300 Spare quartz crystals. Pack of three 个

3320 Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) 个

4513 Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted 个

3340 Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm 个

3350 Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm 个

3360 Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm 个

3370 variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used 个

靶材的选购(举例如下，实际提供的靶材规格材质更多)：

货号产品名称规格

3410 57mm Ø x 0.1mm,金靶个

3411 57mm Ø x 0.1mm金/钯靶(80/20) 个

3412 57mm Ø x 0.1mm铂金靶个

3413 57mm Ø x 0.1mm镍靶个

3414 57mm Ø x 0.1mm银靶个

3415 57mm Ø x 0.1mm钯靶个

3416 57mm Ø x 0.1mm铜靶个

3417 57mm Ø x 0.3mm铬靶个

3418 57mm Ø x 0.5mm钨靶个

3422 57mm Ø x 0.1mm铝靶个

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EMS 150T镀膜仪(镀碳仪、喷金仪、离子溅射镀膜仪)

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